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Preparation and optoelectronic properties of a-IGZO thin films deposited by RF magnetron sputtering at different working pressures

โœ Scribed by Ma, Rui-Xin; Xiao, Yu-Qin; Li, Shi-Na; Wang, Yuan-Yuan; Li, Dong-Ran; He, Liang-Wei


Book ID
125381838
Publisher
Nonferrous Metals Society of China
Year
2014
Tongue
English
Weight
756 KB
Volume
37
Category
Article
ISSN
1001-0521

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