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Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD

โœ Scribed by Junying Hao; Tao Xu; Weimin Liu

Book ID
116668886
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
174 KB
Volume
351
Category
Article
ISSN
0022-3093

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