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Correlation between the microstructure and optical properties of carbon nitride films deposited by rf magnetron sputtering

โœ Scribed by O. Durand-Drouhin; M. Lejeune; M. Clin; J. Henocque

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
194 KB
Volume
4
Category
Article
ISSN
1369-8001

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