Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el
Synthesis, structure and mechanical properties of fullerene-like carbon nitride films deposited by DC magnetron sputtering
β Scribed by D.G. Liu; J.P. Tu; C.D. Gu; C.F. Hong; R. Chen; W.S. Yang
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 983 KB
- Volume
- 205
- Category
- Article
- ISSN
- 0257-8972
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