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The Effect of Substrate Temperature on the Structure and Hardness of Magnetron Sputtering Deposited Carbon Nitride Films

✍ Scribed by Zheng, W. T. ;Guo, J. H. ;Sjöström, H. ;Sundgren, J.-E.

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 197 KB
Volume: 172
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199904)172:2<373::aid-pssa373>3.0.co;2-l

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