Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el
Microstructure and magnetic properties of [FePt/AlN]n multilayers deposited by RF magnetron sputtering
β Scribed by Xiao-Hong Xu; Xiao-Li Li; Hai-Shun Wu
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 249 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0921-4526
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