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Stresses, microstructure and resistivity of thin tungsten films deposited by RF magnetron sputtering

✍ Scribed by M.C. Hugon; F. Varniere; B. Agius; M. Froment; C. Arena; J. Bessot

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 451 KB
Volume: 38
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90548-5

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