Properties of ZnO/Cu/ZnO multilayer films deposited by simultaneous RF and DC magnetron sputtering at different substrate temperatures
β Scribed by D.R. Sahu; Jow-Lay Huang
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 851 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0026-2692
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π SIMILAR VOLUMES
We have fabricated ITO-ZnO composition spread films to investigate the effects of substrate temperature on their electrical and optical properties by using combinatorial RF magnetron sputtering. It turned out by X-ray measurement that the film with zinc contents above 16.0 at% [Zn/(In+Zn+Sn)] showed
Oxide 5lms in the ZnO+In 2 O 3 and ZnO+tin-doped indium oxide (ITO) systems were deposited by simultaneous dc sputtering of ZnO and In 2 O 3 or ITO facing targets at substrate temperatures from room temperature up to 3003C. The ratio of the ZnO target current to the sum of both the currents was vari