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Effect of the substrate temperature on the properties of ZnO films grown by RF magnetron sputtering

✍ Scribed by F Chaabouni; M Abaab; B Rezig

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 304 KB
Volume: 109
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2003.10.105

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