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Effect of microstructure on the nanomechanical properties of TiVCrZrAl nitride films deposited by magnetron sputtering

✍ Scribed by Zue-Chin Chang; Shih-Chang Liang; Sheng Han

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
921 KB
Volume
269
Category
Article
ISSN
0168-583X

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Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el