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Synthesis and mechanical properties of hydrogenated carbon and carbon nitride films prepared by magnetron sputtering

โœ Scribed by Hyun S. Myung; Yong S. Park; B. Hong; Jeon G. Han; Leonid R. Shaginyan

Book ID
108289050
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
249 KB
Volume
506-507
Category
Article
ISSN
0040-6090

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