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Structure and properties of carbon nitride films deposited by magnetron sputtering

✍ Scribed by Weitao Zheng; Hong Ji; Wenxue Yu; Haibo Li; Zengsun Jin; Yuming Wang; Jan-Eric Sundgren

Book ID: 114194680
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 161 KB
Volume: 60
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(99)00094-2

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