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Effect of annealing on the composition, structure and mechanical properties of carbon nitride films deposited by middle-frequency magnetron sputtering

✍ Scribed by Z.H. Huang; B. Yang; C.S. Liu; L.P. Guo; X.J. Fan; D.J. Fu

Book ID
113790743
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
610 KB
Volume
61
Category
Article
ISSN
0167-577X

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