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Synthesis and properties of boron carbon nitride (BN:C) films by pulsed-DC magnetron sputtering

✍ Scribed by Tsung-Hsun Tsai; Tien-Syh Yang; Chia-Liang Cheng; Ming-Show Wong

Book ID
114192851
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
169 KB
Volume
72
Category
Article
ISSN
0254-0584

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## Abstract Carbon‐nitride nanocolumns were produced without catalyst metal by dc magnetron sputtering of a graphite target in pure N~2~ gas at pressure of 26.0 Pa on a quartz glass substrate kept at ∼200 °C. The nitrogen/carbon ratio in nanocolumns equals 0.18. Scanning electron microscopy shows t