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Deposition of carbon-containing cubic boron nitride films by pulsed-DC magnetron sputtering

โœ Scribed by Tien-Syh Yang; Tsung-Hsun Tsai; Cheng-Han Lee; Chia-Liang Cheng; Ming-Show Wong


Book ID
117226646
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
226 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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