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Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering

โœ Scribed by Z.F Zhou; I Bello; M.K Lei; K.Y Li; C.S Lee; S.T Lee


Book ID
108422720
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
246 KB
Volume
128-129
Category
Article
ISSN
0257-8972

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