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Characterization of ternary boron carbon nitride films synthesized by RF magnetron sputtering

โœ Scribed by Dong Ho Kim; Eungsun Byon; Sunghun Lee; Jong-Kuk Kim; Hyun Ruh


Book ID
114085713
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
326 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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