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Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system

✍ Scribed by Jimenez, F.; Ekpe, S. D.; Dew, S. K.

Book ID: 120512177
Publisher: AVS (American Vacuum Society)
Year: 2006
Tongue: English
Weight: 682 KB
Volume: 24
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.2210005

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