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Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

✍ Scribed by Huo, Chunqing; Raadu, Michael A; Lundin, Daniel; Gudmundsson, Jon Tomas; Anders, André; Brenning, Nils

Book ID: 111950001
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 1006 KB
Volume: 21
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/21/4/045004

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