Current-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge

✍ Scribed by Magnus, F.; Sveinsson, O. B.; Olafsson, S.; Gudmundsson, J. T.

• Book ID: 118005884
• Publisher: American Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 1020 KB
• Volume: 110
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.3653233