✦ LIBER ✦
Deposition of titanium oxide films by reactive High Power Impulse Magnetron Sputtering (HiPIMS): Influence of the peak current value on the transition from metallic to poisoned regimes
✍ Scribed by C. Nouvellon; M. Michiels; J.P. Dauchot; C. Archambeau; F. Laffineur; E. Silberberg; S. Delvaux; R. Cloots; S. Konstantinidis; R. Snyders
- Book ID
- 113919615
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 860 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0257-8972
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