Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HPPMS) of titanium: the rotating shutter concept

✍ Scribed by Mitschker, F; Prenzel, M; Benedikt, J; von Keudell, A

• Book ID: 115481979
• Publisher: Institute of Physics
• Year: 2012
• Tongue: English
• Weight: 164 KB
• Volume: 45
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/45/40/402001