✦ LIBER ✦
Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs
✍ Scribed by V. Stranak; S. Drache; M. Cada; Z. Hubicka; M. Tichy; R. Hippler
- Book ID
- 102132007
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 275 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0005-8025
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