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Study of the gas rarefaction phenomenon in a magnetron sputtering system

✍ Scribed by A. Palmero; H. Rudolph; F.H.P.M. Habraken

Book ID: 108289301
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 162 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.12.225

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