✦ LIBER ✦

Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system

✍ Scribed by J.C. Sagás; D.A. Duarte; D.R. Irala; L.C. Fontana; T.R. Rosa

Book ID: 113919531
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 1020 KB
Volume: 206
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.07.013

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Titanium nitride deposition on hardened

Titanium nitride deposition on hardened high speed steel by reactive magnetron sputtering

✍ M.Y. Al-Jaroudi; H.T.G. Hentzell; S.E. Hörnström; A. Bengtson 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 642 KB

Deposition of titanium nitride on surfac

Deposition of titanium nitride on surface-hardened structural steel by reactive magnetron sputtering

✍ M.Y. Al-Jaroudi; H.T.G. Hentzell; S.E. Hörnström; A. Bengtson 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 776 KB

Deposition and properties of titanium ni

Deposition and properties of titanium nitride films produced by dc reactive magnetron sputtering

✍ Li-Jian Meng; A Azevedo; MP dos Santos 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 605 KB

Spectroscopic investigation of tantalum

Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system

✍ S Dontchev; P Georgiev; K Gerassimova; J Kourtev 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 296 KB

Thermal stability of tungsten nitride fi

Thermal stability of tungsten nitride films deposited by reactive magnetron sputtering

✍ S.H. Mohamed 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 745 KB

The studies of thermal stability of nitride coatings are important since their structural, thermal, electrical and optical properties are drastically modified by the oxidation layer formed on the top of these coatings. Tungsten nitride films were deposited from metallic tungsten target using reactiv

The deposition and film properties of re

The deposition and film properties of reactively sputtered titanium nitride

✍ R.C. Ellwanger; J.M. Towner 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 816 KB