Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system

✍ Scribed by S Dontchev; P Georgiev; K Gerassimova; J Kourtev

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 296 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90018-1