✦ LIBER ✦
Electric properties of Ti-Si-N thin cermet films deposited in a triode sputtering system with a hot cathode
✍ Scribed by Witold Posadowski
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 368 KB
- Volume
- 162
- Category
- Article
- ISSN
- 0040-6090
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