6112. Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system: S Dontchev et al, Vacuum, 35, 1985, 79–81

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 184 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90379-9