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Study of the plasma parameters in a high-current pulsed magnetron sputtering system

✍ Scribed by A. N. Odivanova; V. G. Podkovyrov; N. S. Sochugov; K. V. Oskomov

Book ID: 111443319
Publisher: SP MAIK Nauka/Interperiodica
Year: 2011
Tongue: English
Weight: 227 KB
Volume: 37
Category: Article
ISSN: 1063-780X
DOI: 10.1134/s1063780x1101003x

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