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Investigation of plasma characteristics in an unbalanced magnetron sputtering system

✍ Scribed by A. A. Solov’ev; N. S. Sochugov; K. V. Oskomov; S. V. Rabotkin

Book ID: 111443097
Publisher: SP MAIK Nauka/Interperiodica
Year: 2009
Tongue: English
Weight: 332 KB
Volume: 35
Category: Article
ISSN: 1063-780X
DOI: 10.1134/s1063780x09050055

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