High rate reactive sputtering in an opposed cathode closed-field unbalanced magnetron sputtering system

✍ Scribed by William D. Sproul; Paul J. Rudnik; Michael E. Graham; Suzanne L. Rohde

• Book ID: 107930079
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 587 KB
• Volume: 43-44
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(90)90080-v