✦ LIBER ✦
Monte Carlo simulation of high rate reactive sputtering of tin oxide in planar d.c. magnetron systems
✍ Scribed by C.D. Tsiogas; J.N. Avaritsiotis
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 815 KB
- Volume
- 219
- Category
- Article
- ISSN
- 0040-6090
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