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Investigation of plasma parameters in the DC planar magnetron in balanced and unbalanced mode

✍ Scribed by V. Straňák; M. Tichý; H. Steffen; S. Wrehde; R. Hippler

Book ID: 105721214
Publisher: Springer
Year: 2004
Tongue: English
Weight: 519 KB
Volume: 54
Category: Article
ISSN: 0011-4626
DOI: 10.1007/bf03166493

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