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COmparison of Some Basic Plasma Parameters and Discharge Characteristics of Planar Magnetron Sputtering Discharges in Argon and Neon

✍ Scribed by I. Petrov; I. Ivanov; V. Orlinov; J. Kourtev

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
500 KB
Volume
30
Category
Article
ISSN
0005-8025

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