6125. The influence of discharge current on the intrinsic stress in Mo films deposited using cylindrical and planar magnetron sputtering sources: J A Thornton and D W Hoffman, J Vac Sci Technol, A3, 1985, 576–579

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 188 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90392-1