𝔖 Bobbio Scriptorium

✦ LIBER ✦

Internal stresses in Cr, Mo, Ta and Pt films deposited by sputtering from a planar magnetron source: D W Hoffman and John A Thornton, J Vac Sci Technol, 20 (3), 1982, 355–358

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 177 KB
Volume: 33
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(83)90707-8

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