✦ LIBER ✦
Internal stresses in amorphous silicon films deposited by cylindrical magnetron sputtering using Ne, Ar, Kr, Xe and Ar + H2: J A Thornton and D W Hoffman, J Vac Sci Technol, 18 (2), 1981, 203–207
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 169 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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