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Study of a rf planar magnetron sputtering discharge: Discharge characteristics and plasma diagnostics

✍ Scribed by P-Y Jouan; G Lemperiere

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
693 KB
Volume
45
Category
Article
ISSN
0042-207X

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The experimental research on the correlation between the discharge parameters (electrode geometry, gas pressure, discharge voltage and current, magnetic field) of a cylindrical cathode discharge in magnetic field is presented. V-I, I p und I-B discharge characteristics are determined under various c