✦ LIBER ✦
Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System
✍ Scribed by I. Petrov; V. Orlinov; I. Ivanov; J. Kourtev
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Volume
- 28
- Category
- Article
- ISSN
- 0005-8025
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