Glow discharge characteristics when magnetron sputtering copper in different plasma atmospheres operated at low input power

✍ Scribed by A Rizk; SB Youssef; SK Habib

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 327 KB
• Volume: 38
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(88)90603-3