Glow discharge characteriztics when magnetron sputtering copper in different plasma atmospheres operated at low input power: A Rizk et al, Vacuum, 38, 1988, 93–95

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 156 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90342-4