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Mass Spectrometry Study of a Magnetron Planar Glow Discharge Excited in the Direct-Current and in the Radio-Frequency Mode: An Experimental Design Approach

✍ Scribed by Molle, Christel; Springael, Sabine; Wautelet, Michel; Dauchot, Jean-Pierre; Hecq, Michel


Book ID
115362627
Publisher
Society for Applied Spectroscopy
Year
1995
Tongue
English
Weight
749 KB
Volume
49
Category
Article
ISSN
0003-7028

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