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Plasma investigation of PVD processes operating in dc continuous and/or dc pulsed mode

✍ Scribed by Georg N. Strauss; Stefan Schlichtherle; Hans K. Pulker

Book ID: 111702292
Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 307 KB
Volume: 19
Category: Article
ISSN: 0947-076X
DOI: 10.1002/vipr.200700325

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