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Investigations of Production Processes of Ti + in High-Pressure Magnetron Sputtering Plasmas

✍ Scribed by Nafarizal, Nayan; Takada, Noriharu; Sasaki, Koichi

Book ID: 118067153
Publisher: Institute of Pure and Applied Physics
Year: 2009
Tongue: English
Weight: 598 KB
Volume: 48
Category: Article
ISSN: 0021-4922
DOI: 10.1143/jjap.48.126003

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