The effect of Ti sputter target oxidation level on reactive High Power Impulse Magnetron Sputtering process behaviour

✍ Scribed by Martynas Audronis; Victor Bellido-Gonzalez

• Book ID: 113919411
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 378 KB
• Volume: 205
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.02.056