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Plasma diagnostics of the high pressure oxygen-sputtering process

✍ Scribed by G.K. Muralidhar; G. Mohan Rao; A.G. Menon; S. Mohan


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
318 KB
Volume
224
Category
Article
ISSN
0040-6090

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