✦ LIBER ✦
Oxygen depth profiling of high pressure DC-sputtered amorphous silicon
✍ Scribed by R.R. Koropecki; R. Arce; J. Ferrón
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 381 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0169-4332
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