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Plasma diagnostics of low pressure microwave-enhanced d.c. sputtering discharge

✍ Scribed by M. Mišina; J. Musil

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 367 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08247-6

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