✦ LIBER ✦

Optical Emission Diagnostic of a Low Pressure Planar Microwave Discharge for Plasmachemical Deposition

✍ Scribed by J. Röpcke; A. Ohl

Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 573 KB
Volume: 31
Category: Article
ISSN: 0005-8025
DOI: 10.1002/ctpp.2150310610

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Temperature Distributions Across the Pla

Temperature Distributions Across the Plasma Layer of Planar Low Pressure Microwave Plasmas — A Comparative Investigation by Optical Emission Spectroscopy

✍ J. Röpcke; A. Ohl 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 745 KB

Prospects of Phase Resolved Optical Emis

Prospects of Phase Resolved Optical Emission Spectroscopy as a Powerful Diagnostic Tool for RF-Discharges

✍ T. Gans; V. Schulz-von der Gathen; H. F. Döbele 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 236 KB

## Abstract Phase resolved optical emission spectroscopy (PROES) bears considerable potential for diagnostics of RF discharges that give detailed insight of spatial and temporal variations of excitation processes. Based on phase and space resolved measurements of the population dynamics of excited

A Linear Model for the Interpretation of

A Linear Model for the Interpretation of Optical Emission Spectroscopy Measurements in Low Pressure DC Magnetron Sputtering

✍ J. Schulte; G. Sobe; G. Reiss 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 902 KB

For a balanced dc magnetron discharge a linear model for the formation of excited and ionized species is presented. The consideration is based on collisional kinetic theory and a correlation of discharge current with ionization rates, and leads to normalized rate coefficients. The electron energy di