Temperature Distributions Across the Plasma Layer of Planar Low Pressure Microwave Plasmas — A Comparative Investigation by Optical Emission Spectroscopy

Erosion Behaviour of Metal-Doped Carbon

Erosion Behaviour of Metal-Doped Carbon Layers in Deuterium Low Pressure Plasmas and the Determination by Optical Emission Spectroscopy

✍ P. Starke; C. Adelhelm; M. Balden 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 259 KB 👁 1 views

## Abstract The erosion behaviour of doped carbon materials was investigated in deuterium low pressure discharges. Therefore, amorphous carbon films on silicon substrates (film thickness ∼1 μm) with varying dopant species (V, Ti andW), dopant concentration (between 1 at% and 8.5 at%) and dopant dis